SOI-Wellenleiter und -Komponenten auf Basis von amorphem und polykristallinem Silizium

Stichworte

• Silizium-Photonik

Publikationen

• Lipka,T.; Kiepsch, M.; Trieu, H.K.; Müller, J.: Hydrogenated amorphous silicon photonic device trimming by UV-irradiation Optics Express, Vol. 22(Issue 10): S. 12122-12132 , 2014.
• Lipka, T.; Amthor, J.; Trieu, H.K.; Müller, J.: Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon. In Proc. SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II (2013) 876707 , Mai 2013.
• Lipka, T.; Amthor, J.; Trieu, H.K.; Müller, J.: On-chip Biosensing with high-Q Amorphous Silicon Microdisk Resonators Proceedings AMA Conferences 2013 - SENSOR 2013, OPTO 2013, IRS 2 2013, Mai 2013.
• Lipka, T.; Horn, O.; Amthor, J.; Müller, J.: Low-Loss Multilayer Compatible a-Si: H Optical Thin Films for Photonic Applications Journal of the European Optical Society - Rapid Publications, vol. 7(No. 12033), 2012.
• Lipka, T.; Amthor, J.; Krückel, C.; Müller, J.: High Q-factor Hydrogenated Amorphous Silicon Microdisk Resonators. In Proceedings of the 17th IEEE Opto-Electronics and Communications Conference (OECC) 2012, 2012.
• Lipka, T.; Amthor, J.; Müller, J.: Process and Device Uniformity of Low-Loss a-Si:H. In Proceedings of IEEE Photonics Conference (IPC) 2012, 2012.
• Lipka, T.; Amthor, J.; Müller, J. : Towards 3D-Photonic Integration using Hydrogenated Amorphous Silicon. In 2nd Workshop on Tunable and Active Silicon Photonics , 2011.
• Lipka, T.; Horn, O.; Amthor, J.; Müller, J. , BMBF ; VDE ; GMM ; VDI/VDE-IT: Highly Integrated Optical Amorphous Silicon Couplers and Resonators. In MikroSytemTechnik Kongress 2011, Oktober 2011.
• Lipka, T.; Amthor, J.; Horn, O.; Müller, J.: Fabrication of Low-Loss Multilayer Compatible Hydrogenated Amorphous Silicon Thin Films for Photonic Applications. In 1st EOS Topical Meeting on Micro- and Nano-Optoelectronic Systems , 2011.