| Microsystems Technology (VL) |
| Subtitle: |
| This course is part of the module: Microsystems Technology, Microsystems Technology in Theory and Practice |
| Semester: |
| WiSe 23/24 |
| Course type: |
| Lecture |
| Course number: |
| lv724_w23 |
| Lecturer: |
| Prof. Dr. Hoc Khiem Trieu, Sven Bohne, M. Sc Konstanze Schober |
| Description: |
| The course Microsystems Technology (lecture only, 4 ECTS)/Microsystems Technology in Theory and Practice (lecture plus practical course, 6 ECTS) addresses three subjects:
Processing technology for the fabrication of microsystems,
device technology including operating principles and applications of micro sensors and actuators,
and system integration technology.
Students will learn how to fabricate microsystems and how to use the devices in e.g. measurement technology or medical engineering. The practical course (obligatory for ETMS, IMPMM, MEDMS, IIWMS, and IWIMS) provides the opportunity to transfer the theoretical knowledge into practice. |
| Pre-requisites: |
| Basics in physics, chemistry and semiconductor technology |
| Performance accreditation: |
| Oral exam |
| ECTS credit points: |
| 4 |
| Stud.IP informationen about this course: |
Home institute: Institut für Mikrosystemtechnik (E-7)
Registered participants in Stud.IP: 113
Documents: 71
|
