Dr. Davood Babazadeh

Guest Lecturer

Contact

Dr. Davood Babazadeh
E-6 Elektrische Energietechnik
  • Elektrische Energietechnik
Harburger Schloßstraße 36,
21079 Hamburg
Building HS36, Room C3 1.013
Phone: +49 40 42878
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TUHH Open Research (TORE)

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Courses

Stud.IP
link to course in Stud.IP Studip_icon
Microsystem Engineering (VL)
Subtitle:
This course is part of the module: Microsystem Engineering
Semester:
WiSe 23/24
Course type:
Lecture
Course number:
lv680_w23
Lecturer:
Prof. Dr. Thomas Kusserow
Description:

Object and goal of MEMS

Scaling Rules

Lithography

Film deposition

Structuring and etching

Energy conversion and force generation

Electromagnetic Actuators

Reluctance motors

Piezoelectric actuators, bi-metal-actuator

Transducer principles

Signal detection and signal processing

Mechanical and physical sensors

Acceleration sensor, pressure sensor

Sensor arrays

System integration

Yield, test and reliability

Performance accreditation:
610 - Microsystem Engineering<ul><li>610 - Microsystem Engineering: Klausur schriftlich</li></ul><br>m746 - Microsystem Engineering<ul><li>p185 - Microsystem Engineering: Klausur schriftlich</li><li>vl259 - Microsystem Engineering - Presentation: Presentation</li></ul><br>m746-2020 - Microsystem Engineering<ul><li>p185 - Microsystem Engineering: Klausur schriftlich</li><li>vl259 - Microsystem Engineering - Presentation: Presentation</li></ul>
ECTS credit points:
4
Stud.IP informationen about this course:
Home institute: Institut für Mikrosystemtechnik (E-7)
Registered participants in Stud.IP: 1