The custom-developed MMR sensor detects pressure-induced changes in resonance frequency via a flexible 3D-printed membrane, whose thickness is crucial to performance and sensitivity. Static and dynamic measurements show a minimum sensitivity of 0.06 Hz mbar⁻¹ and a maximum readout frequency of 2 Hz, which aligns with theoretical predictions. The sensor’s resonance frequency also depends significantly on temperature. Overall, this MMR sensor offers a promising and versatile approach to precise pressure measurement in process engineering.
Merbach, Timo; Kexel, Felix; Faltinath, Jonas ; Möddel, Martin; Schlüter, Michael; Knopp, Tobias; Mohn, Fabian (2025). Wireless and passive pressure detection using magneto-mechanical resonances in process engineering. Meas. Sci. Technol. 36, 085109.
