New materials for strain gauges
A strain gauge is one of the most powerful sensors for experimental mechanical analysis, e.g. pressure, force or acceleration. Versatile applications in sectors like medical technology or aerospace make new developments of strain gauges interesting. Conventional strain gauges are limited because of the low strain sensitivity or high temperature dependence of the used material.
The aim of this industrial cooperation project is the development of a strain gauge, which combines low temperature dependence and high sensitivity of strain. Therefore new materials for strain gauges on new carrier substrates (Fig.1) are investigated. To compete with existing strain gauges the production process is compatible with standard methods of thin film technology like vapour deposition and structuring. Several characterisation methods (FTIR, XRD, SEM, electrical, temperature and strain measurements) are used to evaluate and limit the parameter field.
At the end of the project a new industrial fabrication process for advanced material strain gauges with low temperature dependence and high sensitivity is to be presented.
Fig.1: Strain gauge on silicon.
