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Institute of Microsystems Technology
Logo Institute of Microsystems Technology
Institute of Microsystems Technology
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Prof. Dr.-Ing. Kasper

 

Lecture Notes

Chapter 1

Introduction

Chapter 2

Microsystem Technologies

Chapter 9

System Integration

Chapter 13

Sensors
Chapter 12Microactuators

 

Example of Examination Questions
WS 2003/04Prüfung (dt.)Examination (eng.)
WS 2004/05Prüfung (dt.)Examination (eng.)
WS 2005/06Prüfung (dt.)Examination (eng.)

 

 

TU Hamburg
Institute of Microsystems Technology
E-7
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21073 Hamburg
E-mail : nina.gebke@tuhh.de
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