Amorphous Silicon Spot-Size Converters Fabricated with a Shadow Mask

Amorphous Silicon Spot-Size Converters Fabricated with&

T. Lipka, A. Harke, O. Horn, J. Amthor, M. Krause, Jörg Müller,
Amorphous Silicon Spot-Size Converters Fabricated with a Shadow Mask
5th International Conference on Group IV Photonics (GFP), Sorrento, Italy, 17-19 September (Paper ThP23), (2008)

Abstract: A rib-like spot-size converter was fabricated with a KOH etched shadow mask. The improvement in coupling and an expansion of the spot-size were evaluated with simulations and confirmed by transmission loss measurements.

Home	m.krause@tu-harburg.de