Welcome to the Institute of Microsystems Technology

More than 20 scientists and engineers conduct research at the Institute of Microsystems Technology at TUHH on current issues in the areas of medical engineering, microsensor technology and life science - supported by many students elaborating their research projects and bachelor or master theses.
The institute has all the necessary equipment for the semiconductor and microsystem technology allocated on over 650 m┬▓ of laboratory and clean room area (class ISO2).

With many years of experience in process technology, our engineers can flexibly respond to specific system requirements and develop customized solutions. In addition to the standard Si technology and the use of DRIE as well as glass wafers for microfluidics, processing of polymers for the fabrication of mechanically flexible microsystems characterizes our technology profile. Special equipments such as a critical point dryer, CMP or nanoimprint and an extensive pool of analysis tools complete our facilities.
With increasing penetration of microsystems technology in everyday applications, system solutions are needed instead of component solutions. Due to our holistic approach of modelling, process technology and system integration, we are ideally positioned to meet this request. In addition to an intelligent assembly and packaging technology, we offer solutions including the required electronics and signal processing in hardware and software. Transponder solutions as well as energy management and energy harvesting are part of our R&D portfolio.